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Ion beam mixing information


Ion beam mixing is the atomic intermixing and alloying that can occur at the interface separating two different materials during ion irradiation.[1] It is applied as a process for adhering two multilayers, especially a substrate and deposited surface layer. The process involves bombarding layered samples with doses of ion radiation in order to promote mixing at the interface, and generally serves as a means of preparing electrical junctions, especially between non-equilibrium or metastable alloys and intermetallic compounds. Ion implantation equipment can be used to achieve ion beam mixing.

  1. ^ Ion-solid interactions, Cambridge Solid-State Science series, ch11, p295

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