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Extreme ultraviolet information


Extreme ultraviolet composite image of the Sun (red: 21.1 nm, green: 19.3 nm, blue: 17.1 nm) taken by the Solar Dynamics Observatory on August 1, 2010
13.5 nm extreme ultraviolet light is used commercially for photolithography as part of the semiconductor fabrication process. This image shows an early, experimental tool.

Extreme ultraviolet radiation (EUV or XUV) or high-energy ultraviolet radiation is electromagnetic radiation in the part of the electromagnetic spectrum spanning wavelengths shorter that the hydrogen Lyman-alpha line from 121 nm down to the X-ray band of 10 nm. By the Planck–Einstein equation the EUV photons have energies from 10.26 eV up to 124.24 eV where we enter the X-ray energies. EUV is naturally generated by the solar corona and artificially by plasma, high harmonic generation sources and synchrotron light sources. Since UVC extends to 100 nm, there is some overlap in the terms.

The main uses of extreme ultraviolet radiation are photoelectron spectroscopy, solar imaging, and lithography. In air, EUV is the most highly absorbed component of the electromagnetic spectrum, requiring high vacuum for transmission.

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Extreme ultraviolet

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Extreme ultraviolet radiation (EUV or XUV) or high-energy ultraviolet radiation is electromagnetic radiation in the part of the electromagnetic spectrum...

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Extreme ultraviolet lithography

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Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a cutting-edge technology used in the semiconductor industry for manufacturing integrated...

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Extreme Ultraviolet Explorer

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The Extreme Ultraviolet Explorer (EUVE or Explorer 67) was a NASA space telescope for ultraviolet astronomy. EUVE was a part of NASA's Explorer spacecraft...

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Solar Dynamics Observatory

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variability and its effects. The Extreme Ultraviolet Variability Experiment (EVE) measures the Sun's extreme ultraviolet irradiance with improved spectral...

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Ultraviolet

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shorter-wavelength "extreme" UV below 121 nm ionizes air so strongly that it is absorbed before it reaches the ground. However, ultraviolet light (specifically...

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Solar physics

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satellite, launched in 2006, consists of a coordinated set of optical, extreme ultraviolet and X-ray instruments. These investigate the interaction between...

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Electromagnetic spectrum

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wavelengths—much smaller than an atomic nucleus. Gamma rays, X-rays, and extreme ultraviolet rays are called ionizing radiation because their high photon energy...

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Extreme ultraviolet Imaging Telescope

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The Extreme ultraviolet Imaging Telescope (EIT) is an instrument on the SOHO spacecraft used to obtain high-resolution images of the solar corona in the...

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Solar Radiation and Climate Experiment

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was a NASA-sponsored satellite mission that measured incoming X-ray, ultraviolet, visible, near-infrared, and total solar radiation. These measurements...

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ASML Holding

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the semiconductor industry and the sole supplier in the world of extreme ultraviolet lithography (EUV) photolithography machines that are required to...

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Hitchhiker Program

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10/29/98 95 IEH-3 HH Ultraviolet Spectrograph Telescope for Astronomical Research (UVSTAR), U of AZ/ESA Solar Extreme Ultraviolet Hitchhiker (SEH), USC...

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Photolithography

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light used, including ultraviolet lithography, deep ultraviolet lithography, extreme ultraviolet lithography (EUVL), and X-ray lithography. The wavelength...

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Ultraviolet astronomy

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Ultraviolet astronomy is the observation of electromagnetic radiation at ultraviolet wavelengths between approximately 10 and 320 nanometres; shorter wavelengths—higher...

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Solar flare

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electromagnetic radiation across the electromagnetic spectrum. The extreme ultraviolet and x-ray radiation from solar flares is absorbed by the daylight...

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Optical coating

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infrared, but suffers from decreasing reflectivity (<90%) in the blue and ultraviolet spectral regions. Most expensive is gold, which gives excellent (98%-99%)...

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Michael Lampton

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years. Lampton was heavily involved with the Extreme Ultraviolet Explorer project. The Extreme Ultraviolet Explorer, a NASA explorer class satellite mission...

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TSMC

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processors) production capabilities, and the first to commercialize extreme ultraviolet (EUV) lithography technology in high volume. In 1986, Li Kwoh-ting...

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Electromagnetic radiation

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Types of EMR include radio waves, microwaves, infrared, (visible) light, ultraviolet, X-rays, and gamma rays, all of which are part of the electromagnetic...

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Stellar corona

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particular, ultraviolet telescopes such as TRACE and SOHO/EIT can observe individual micro-flares as small brightenings in extreme ultraviolet light, but...

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XUV

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2011–present compact SUV Mahindra XUV700, a 2021–present compact SUV Extreme ultraviolet radiation This disambiguation page lists articles associated with...

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Solwind

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carried a gamma-ray spectrometer, a white-light coronagraph, an extreme-ultraviolet imager, an X-ray spectrometer, a high-latitude particle spectrometer...

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Apollo Telescope Mount

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soft X-ray, ultraviolet, and visible light. two X-ray telescopes extreme ultraviolet spectroheliograph ultraviolet spectroheliometer ultraviolet spectrograph...

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Electromagnetic radiation and health

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more than 10 eV energy to ionize atoms or break chemical bonds. Extreme ultraviolet and higher frequencies, such as X-rays or gamma rays are ionizing...

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Refractive index

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using regression analysis, n and κ can be deduced. For X-ray and extreme ultraviolet radiation the complex refractive index deviates only slightly from...

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Canis Major

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second-brightest star of the constellation and the brightest source of extreme ultraviolet radiation in the night sky. Next in brightness are the yellow-white...

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