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Semiconductor device fabrication
MOSFET scaling (process nodes)
020 µm – 1968
010 µm – 1971
006 µm – 1974
003 µm – 1977
1.5 µm – 1981
001 µm – 1984
800 nm – 1987
600 nm – 1990
350 nm – 1993
250 nm – 1996
180 nm – 1999
130 nm – 2001
090 nm – 2003
065 nm – 2005
045 nm – 2007
032 nm – 2009
028 nm – 2010
022 nm – 2012
014 nm – 2014
010 nm – 2016
007 nm – 2018
005 nm – 2020
003 nm – 2022
Future
002 nm ~ 2024
Half-nodes
Density
CMOS
Device (multi-gate)
Moore's law
Transistor count
Semiconductor
Industry
Nanoelectronics
v
t
e
In semiconductor manufacturing, the "7 nm" process is a term for the MOSFET technology node following the "10 nm" node, defined by the International Roadmap for Devices and Systems (IRDS), which was preceded by the International Technology Roadmap for Semiconductors (ITRS). It is based on FinFET (fin field-effect transistor) technology, a type of multi-gate MOSFET technology. As of 2021, the IRDS Lithography standard gives a table of dimensions for "7 nm",[1] with a few given below:
Calculated Value
nm
minimum half pitch (DRAM, MPU metal)
18
minimum half pitch (Flash, MPU fin, LGAA)
15
minimum required OL (DRAM, Flash, MPU)
3.6
Gate pitch
54
Gate length
20
The 2021 IRDS Lithography standard is a backward-facing document, as the first volume production of a "7 nm" branded process, as Taiwan Semiconductor Manufacturing Company (TSMC) began production of 256 Mbit SRAM memory chips using a "7 nm" process called N7 in June 2016,[2] before Samsung began mass production of their "7 nm" process called 7LPP devices in 2018.[3] These process nodes had the same approximate transistor density as Intel's "10 nm Enhanced Superfin" node, later rebranded "Intel 7."[4]
Since at least 1997, the length scale of a process node has not referred to any particular dimension on the integrated circuits, such as gate length, metal pitch, or gate pitch, as new lithography processes no longer uniformly shrank all features on a chip. By the late 2010s, the length scale had become a commercial name[5] that indicated a new generation of process technologies, without any relation to physical properties.[6][7][8] Previous ITRS and IRDS standards had insufficient guidance on process node naming conventions to address the widely varying dimensions on a chip, leading to divergence between how foundries branded their lithography and the actual dimensions their process nodes achieved.
The first mainstream "7 nm" mobile processor intended for mass market use, the Apple A12 Bionic, was released at Apple's September 2018 event.[9] Although Huawei announced its own "7 nm" processor before the Apple A12 Bionic, the Kirin 980 on August 31, 2018, the Apple A12 Bionic was released for public, mass market use to consumers before the Kirin 980. Both chips were manufactured by TSMC.[10]
In 2019,[11] AMD released their "Rome" (EPYC 2) processors for servers and datacenters, which are based on TSMC's N7node[12] and feature up to 64 cores and 128 threads. They also released their "Matisse" consumer desktop processors with up to 16 cores and 32 threads. However, the I/O die on the Rome multi-chip module (MCM) is fabricated with the GlobalFoundries' 14 nm (14HP) process, while the Matisse's I/O die uses the GlobalFoundries' "12 nm" (12LP+) process. The Radeon RX 5000 series is also based on TSMC's N7 process.
^"International Roadmap for Devices and Systems 2021 Update: Lithography" (PDF). International Roadmap for Devices and Systems. April 7, 2024.
^Cite error: The named reference tsmc was invoked but never defined (see the help page).
^Chen, Monica; Shen, Jessie (June 22, 2018). "TSMC ramping up 7nm chip production". DigiTimes. Retrieved September 17, 2022.
^Subramaniam, Vaidyanathan (July 27, 2021). "Intel details new process innovations and node names, Alder Lake 10 nm Enhanced SuperFin is now Intel 7; Intel 20A is the 2 nm process for 2024". Notebook Check.
^Morris, Kevin (July 23, 2020). "No More Nanometers: It's Time for New Node Naming". Electronic Engineering Journal. Retrieved September 17, 2022.
^Shukla, Priyank. "A Brief History of Process Node Evolution". Design-Reuse. Retrieved July 9, 2019.
^Hruska, Joel (June 23, 2014). "14nm, 7nm, 5nm: How low can CMOS go? It depends if you ask the engineers or the economists…". ExtremeTech. Retrieved September 17, 2022.
^Pirzada, Usman (September 16, 2016). "Exclusive: Is Intel Really Starting To Lose Its Process Lead? 7nm Node Slated For Release in 2022". Wccftech. Retrieved September 17, 2022.
^Shankland, Stephen (September 12, 2018). "Apple's A12 Bionic CPU for the new iPhone XS is ahead of the industry moving to 7nm chip manufacturing tech". CNET. Retrieved September 16, 2018.
^Summers, N. (September 12, 2018). "Apple's A12 Bionic is the first 7-nanometer smartphone chip". Engadget. Retrieved September 20, 2018.
^"AMD Launches Epyc Rome, First 7nm CPU". August 8, 2019.
^Smith, Ryan (July 26, 2018). "AMD "Rome" EPYC CPUs to Be Fabbed By TSMC". AnandTech. Retrieved June 18, 2019.
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