The argon fluoride laser (ArF laser) is a particular type of excimer laser,[1] which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while "exciplex" is short for "excited complex". An excimer laser typically uses a mixture of a noble gas (argon, krypton, or xenon) and a halogen gas (fluorine or chlorine), which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation (laser light) in the ultraviolet range.
ArF (and KrF) excimer lasers are widely used in high-resolution photolithography machines, a critical technology for microelectronic chip manufacturing. Excimer laser lithography[2][3] has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 7 nanometers in 2018.[4][5][6] Extreme ultraviolet lithography machines have replaced ArF photolithography machines in some cases as they enable even smaller feature sizes while increasing productivity, as EUV machines can provide sufficient resolution in fewer steps.[7]
The development of excimer laser lithography has been highlighted as one of the major milestones in the 50-year history of the laser.[8][9]
^Basting, D.; Marowsky, G. (2005). "Introductory Remarks". Excimer Laser Technology. Berlin: Springer-Verlag. pp. 1–7. Bibcode:2005elt..book....1B. doi:10.1007/3-540-26667-4_1. ISBN 3-540-20056-8.
^Jain, K.; Willson, C.G.; Lin, B.J. (1982). "Ultrafast deep UV Lithography with excimer lasers". IEEE Electron Device Letters. 3 (3): 53–55. Bibcode:1982IEDL....3...53J. doi:10.1109/EDL.1982.25476. S2CID 43335574.
^Jain, Kanti (1987-03-11). Luk, Ting-Shan (ed.). "Advances In Excimer Laser Lithography". Excimer Lasers and Optics. 0710. SPIE: 35. Bibcode:1987SPIE..710...35J. doi:10.1117/12.937294. S2CID 136477292.
^"Samsung Starts Industry's First Mass Production of System-on-Chip with 10-Nanometer FinFET Technology". news.samsung.com. Retrieved 2021-10-25.
^"Lasers and Moore's Law". spie.org. Retrieved 2021-10-25.
^"TSMC Kicks Off Volume Production of 7nm Chips". AnandTech. 2018-04-28. Retrieved 2018-10-20.
^"EUV Lithography Finally Ready for Chip Manufacturing". IEEE Spectrum. January 5, 2018.
^"SPIE / Advancing the Laser / 50 Years and into the Future" (PDF).
^"U.K. Engineering & Physical Sciences Research Council / Lasers in Our Lives / 50 Years of Impact" (PDF). Archived from the original (PDF) on September 13, 2011.
and 28 Related for: Argon fluoride laser information
The argonfluoridelaser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer...
A krypton fluoridelaser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248...
Research Laboratory built two systems, the Krypton fluoridelaser (248 nm) and the Argonfluoridelaser (193 nm) to test approaches to prove out Inertial...
at up to 200 wafers per hour, using a water immersion lens and an argonfluoridelaser that produces light at a wavelength of 193 nm. As of 2011[update]...
small GTP-binding protein The Arf invariant in mathematics Argonfluoridelaser or ArF laser Atomic Resonance Filter or atomic line filter Auxin Response...
experimental or observational results. The argonfluoridelaser is important in photolithography of silicon chips. These lasers make a strong ultraviolet emission...
replaced by laser diodes. Nitrogen lasers and excimer laser are used in pulsed dye laser pumping. Ion lasers, mostly argon, are used in CW dye laser pumping...
ultraviolet excimer lasers in lithography systems are the krypton fluoride (KrF) laser at 248 nm wavelength and the argonfluoridelaser (ArF) at 193 nm wavelength...
with pure argon provide lilac/violet light; with argon and some mercury, blue light. Argon is also used for blue and green argon-ion lasers. Argon is used...
operation wavelength of the dye laser. Gases, such as carbon dioxide, argon, krypton and mixtures such as helium–neon. These lasers are often pumped by electrical...
applications. As examples, in the hydrogen fluoridelaser (2700–2900 nm) and the deuterium fluoridelaser (3800 nm) the reaction is the combination of...
gas lasers (krypton ion and excimer lasers), each of which resonates and amplifies a single spectral line. Krypton fluoride also makes a useful laser medium...
This is a list of laser types, their operational wavelengths, and their applications. Thousands of kinds of laser are known, but most of them are used...
of the noble gases argon, krypton, and radon, including argon fluorohydride (HArF), krypton difluoride (KrF2), and radon fluoride. By 1971, more than...
This is a list of laser topics. Contents: Top 0–9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z Physics portal M. Born and E. Wolf, Principles...
with excimer wavelengths, first of 248 nm (krypton fluoridelaser), then 193 nm (argonfluoridelaser), which was called deep UV. The next step, going even...
fluorine under special conditions, while argon will undergo chemical transformations only with hydrogen fluoride. Nitrogen, with its very stable triple...
occurring members of group 18 of the periodic table: helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), and radon (Rn). Under standard conditions...
lasers. Commercial excimer lasers operating in the ultraviolet use a double-discharge regime very similar to the CO2 TEA laser. Using krypton, argon or...
xenon (12.1 eV), and radon (10.7 eV) on one side, and the very unreactive argon (15.8 eV), neon (21.6 eV), and helium (24.6 eV) on the other. Consistent...
experiment. The laser radiation can be fixed in wavelength such as that of an argon ion laser or that of a tunable dye laser. Laser power required is...
immersion deep ultraviolet lithography tool which features an argonfluoride (ArF) excimer laser emitting coherent ultraviolet light at a wavelength of 193 nm...
presence of NaF yields high-purity XeF 4. The xenon fluorides behave as both fluoride acceptors and fluoride donors, forming salts that contain such cations...
under argon atmosphere. A large variety of medical applications (i.e. dermatology, dentistry) utilize erbium ion's 2940 nm emission (see Er:YAG laser), which...
lasers are excimer lasers. They are widely used lasers emitting in ultraviolet and vacuum ultraviolet wavelength ranges. Presently, UV argon-fluoride...
Nike laser at the United States Naval Research Laboratory in Washington, DC is a 56-beam, 4–5 kJ per pulse electron beam pumped krypton fluoride excimer...
Global Information