The electra laser at NRL is a KrF laser that demonstrated over 90,000 shots in 10 hours.
A krypton fluoride laser (KrF laser) is a particular type of excimer laser,[1] which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. An excimer laser typically contains a mixture of: a noble gas such as argon, krypton, or xenon; and a halogen gas such as fluorine or chlorine. Under suitably intense conditions of electromagnetic stimulation and pressure, the mixture emits a beam of coherent stimulated radiation as laser light in the ultraviolet range.
KrF and ArF excimer lasers are widely incorporated into high-resolution photolithography machines, one of the critical tools required for microelectronic chip manufacturing in nanometer dimensions. Excimer laser lithography[2][3] has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 10 nanometers in 2016.[4][5]
^Basting, D. and Marowsky,G., Eds., Excimer Laser Technology, Springer, 2005.
^Jain, K.; Willson, C.G.; Lin, B.J. (1982). "Ultrafast deep UV Lithography with excimer lasers". IEEE Electron Device Letters. 3 (3): 53–55. Bibcode:1982IEDL....3...53J. doi:10.1109/EDL.1982.25476. S2CID 43335574.
^Jain, K. "Excimer Laser Lithography", SPIE Press, Bellingham, WA, 1990.
^La Fontaine, B., "Lasers and Moore's Law", SPIE Professional, Oct. 2010, p. 20.
^Samsung Starts Industry's First Mass Production of System-on-Chip with 10-Nanometer FinFET Technology; https://news.samsung.com/global/samsung-starts-industrys-first-mass-production-of-system-on-chip-with-10-nanometer-finfet-technology
and 26 Related for: Krypton fluoride laser information
A kryptonfluoridelaser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248...
which resonates and amplifies a single spectral line. Kryptonfluoride also makes a useful laser medium. From 1960 to 1983, the official definition of...
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Naval Research Laboratory built two systems, the Kryptonfluoridelaser (248 nm) and the Argon fluoridelaser (193 nm) to test approaches to prove out Inertial...
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This is a list of laser types, their operational wavelengths, and their applications. Thousands of kinds of laser are known, but most of them are used...
notably the solid-state lasers (Nd:glass lasers) at LLNL and the University of Rochester, and kryptonfluoride excimer lasers systems at Los Alamos and...
the noble gases argon, krypton, and radon, including argon fluorohydride (HArF), krypton difluoride (KrF2), and radon fluoride. By 1971, more than 80...
second laser, the Titania, at that time said to be the world brightest kryptonfluoridelaser. The Vulcan is the world's most powerful laser user facility...
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and krypton can be made to react with fluorine under special conditions, while argon will undergo chemical transformations only with hydrogen fluoride. Nitrogen...
that to a kryptonfluoridelaser (KrF). It went on to describe the battle-station concept in which a single bomb would be surrounded by laser rods that...
of group 18 of the periodic table: helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), and radon (Rn). Under standard conditions, these elements...
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TEA lasers. Commercial excimer lasers operating in the ultraviolet use a double-discharge regime very similar to the CO2 TEA laser. Using krypton, argon...
are reported to exist as a part of the function of excimer lasers.[citation needed] Krypton gas reacts with fluorine gas under extreme forcing conditions...
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