Transfer length method (a.k.a. Transmission line measurement)
The Transfer Length Method or the "Transmission Line Model" (both abbreviated as TLM) is a technique used in semiconductor physics and engineering to determine the specific contact resistivity between a metal and a semiconductor.[1][2][3] TLM has been developed because with the ongoing device shrinkage in microelectronics the relative contribution of the contact resistance at metal-semiconductor interfaces in a device could not be neglected any more and an accurate measurement method for determining the specific contact resistivity was required.[4]
^Cohen, SS; Gildenblatt, G Sh. (1986). Chapter 4 - Test Structures for Ohmic Contact Characterization. VLSI Electronics Microstructure Science Volume 13 Chapter 4. Elsevier. ISBN 9780122341137.
^Williams, Ralph (1990). Modern GaAs Processing Methods. Artech House. ISBN 0890063435.
^Schroder, Dieter K. (2006). Semiconductor Material and Device Characterization. John Wiley & Sons. ISBN 0471739065.
^Berger HH (June 1971). "Models for contacts to planar devices". Solid State Electronics. 15 (2): 145–158. doi:10.1016/0038-1101(72)90048-2.
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