Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references
Chemical compound
Nitrogen trifluoride (NF 3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics.[6] Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas. Its atmospheric burden exceeded 2 parts per trillion during 2019 and has doubled every five years since the late 20th century.[7][8]
^Air Products; Physical Properties for Nitrogen Trifluoride
^Sinke, G. C. (1967). "The enthalpy of dissociation of nitrogen trifluoride". J. Phys. Chem. 71 (2): 359–360. doi:10.1021/j100861a022.
^Inorganic Chemistry, p. 462, at Google Books
^ abcNIOSH Pocket Guide to Chemical Hazards. "#0455". National Institute for Occupational Safety and Health (NIOSH).
^"Nitrogen trifluoride". Immediately Dangerous to Life or Health Concentrations (IDLH). National Institute for Occupational Safety and Health (NIOSH).
^Richard Conniff (2008-11-13). "The Greenhouse Gas That Nobody Knew". Yale School of Environment.
^Cite error: The named reference epacci was invoked but never defined (see the help page).
^Cite error: The named reference noaanf3 was invoked but never defined (see the help page).
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and 29 Related for: Nitrogen trifluoride information
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tetrafluoroammonium fluoride (NF+ 4F−). This was made by treating nitrogentrifluoride and fluorine with 3 MeV electron radiation at 77 K. It decomposed...
though not readily, to produce nitrogen gas; it burns in fluorine with a greenish-yellow flame to give nitrogentrifluoride. Reactions with the other nonmetals...
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tetrachloride, normally incombustible, may explode. Although nitrogentrifluoride is stable, nitrogen requires an electric discharge at elevated temperatures...
hydrogen or deuterium gas with combustion products of ethylene in nitrogentrifluoride. Excimer lasers are a special sort of gas laser powered by an electric...
Trifluoramine oxide or Nitrogentrifluoride oxide (F3NO) is an inorganic molecule with strong fluorinating powers. Trifluoramine oxide was first discovered...
NF3 may refer to: Nitrogentrifluoride (NF3), a colorless gas used as an etchant Zukertort Opening, an opening move in chess (1. Nf3) This disambiguation...
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hydrogen or deuterium gas with combustion products of ethylene in nitrogentrifluoride. They were invented by George C. Pimentel. Chemical lasers are powered...
contaminated with NO or N2O. Nitrogen difluoride is formed during the function of a xenon monofluoride excimer laser. Nitrogentrifluoride is the halide carrier...
hydrofluorocarbons (HFCs), perfluorocarbons (PCFs), sulfur hexafluoride (SF6) and nitrogentrifluoride (NF3)." In comparison, the IPCC definition of carbon footprint in...
high-voltage switchgear and is used in the production of magnesium. Nitrogentrifluoride (NF3) is used primarily as an etchant for microelectronics fabrication...
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