Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references
Chemical compound
Nitrogen trifluoride (NF 3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics.[6] Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas. Its atmospheric burden exceeded 2 parts per trillion during 2019 and has doubled every five years since the late 20th century.[7][8]
^Air Products; Physical Properties for Nitrogen Trifluoride
^Sinke, G. C. (1967). "The enthalpy of dissociation of nitrogen trifluoride". J. Phys. Chem. 71 (2): 359–360. doi:10.1021/j100861a022.
^Inorganic Chemistry, p. 462, at Google Books
^ abcNIOSH Pocket Guide to Chemical Hazards. "#0455". National Institute for Occupational Safety and Health (NIOSH).
^"Nitrogen trifluoride". Immediately Dangerous to Life or Health Concentrations (IDLH). National Institute for Occupational Safety and Health (NIOSH).
^Richard Conniff (2008-11-13). "The Greenhouse Gas That Nobody Knew". Yale School of Environment.
^Cite error: The named reference epacci was invoked but never defined (see the help page).
^Cite error: The named reference noaanf3 was invoked but never defined (see the help page).
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and 28 Related for: Nitrogen trifluoride information
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though not readily, to produce nitrogen gas; it burns in fluorine with a greenish-yellow flame to give nitrogentrifluoride. Reactions with the other nonmetals...
tetrafluoroammonium fluoride (NF+ 4F−). This was made by treating nitrogentrifluoride and fluorine with 3 MeV electron radiation at 77 K. It decomposed...
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though not readily, to produce nitrogen gas; it burns in fluorine with a greenish-yellow flame to give nitrogentrifluoride. Reactions with the other nonmetals...
perfluorocarbons (PFCs), sulfur hexafluoride (SF6), nitrogentrifluoride (NF3). Nitrogentrifluoride was added for the second compliance period during the...
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chlorofluorocarbon, hydrochlorofluorocarbon, hydrofluorocarbon, nitrogentrifluoride, perfluorocarbons and sulfur hexafluoride The extraction and subsequent...
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hydrogen or deuterium gas with combustion products of ethylene in nitrogentrifluoride. They were invented by George C. Pimentel. Chemical lasers are powered...
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high-voltage switchgear and is used in the production of magnesium. Nitrogentrifluoride (NF3) is used primarily as an etchant for microelectronics fabrication...