Family of instruments for the measurement of the total mass flow rate of a fluid
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Temperature at the sensors varies depending upon the mass flow
Thermal mass flow meters, also known as thermal dispersion or immersible mass flow meters, comprise a family of instruments for the measurement of the total mass flow rate of a fluid, primarily gases, flowing through closed conduits. A second type is the capillary-tube type of thermal mass flow meter. Many mass flow controllers (MFC) which combine a mass flow meter, electronics and a valve are based on this design. Furthermore, a thermal mass flow meter can be built by measuring temperature differential across a silicon-based MEMS chip.
Both types measure fluid mass flow rate by means of the heat convected from a heated surface to the flowing fluid. In the case of the thermal dispersion, or immersible, type of flow meter, the heat is transferred to the boundary layer of the fluid flowing over the heated surface. In the case of the capillary-tube type, the heat is transferred to the bulk of the fluid flowing through a small heated capillary tube. The principles of operation of the two types are both thermal in nature, but are so substantially different that two separate standards are required. Additionally, their applications are much different. Thermal dispersion flow meters are commonly used for general industrial gas flow applications in pipes and ducts, whereas capillary types are primarily used for smaller flows of clean gases or liquids in tubes. This type is most widely used for thermal mass flow meters in industry. Nevertheless, the capillary type is not the subject of this discussion.
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