Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Chemical compound
Tantalum nitride (TaN) is a chemical compound, a nitride of tantalum. There are multiple phases of compounds, stoichimetrically from Ta2N to Ta3N5, including TaN.
As a thin film TaN find use as a diffusion barrier and insulating layer between copper interconnects in the back end of line of computer chips. Tantalum nitrides are also used in thin film resistors.
Tantalumnitride (TaN) is a chemical compound, a nitride of tantalum. There are multiple phases of compounds, stoichimetrically from Ta2N to Ta3N5, including...
other refractory metals, the hardest known compounds of tantalum are nitrides and carbides. Tantalum carbide, TaC, like the more commonly used tungsten carbide...
nitrides with high melting point. Thin films of titanium nitride, zirconium nitride, and tantalumnitride protect many industrial surfaces. Nitrides of...
of depositing the high-k dielectric and then the gate metal such as Tantalumnitride whose workfunction depends on whether the transistor is NMOS or PMOS...
metals include cobalt, ruthenium, tantalum, tantalumnitride, indium oxide, tungsten nitride, and titanium nitride (the last four being conductive ceramics...
varies, consisting of one or more ceramic (cermet) conductors such as tantalumnitride (TaN), ruthenium oxide (RuO 2), lead oxide (PbO), bismuth ruthenate...
Tantalum carbides (TaC) form a family of binary chemical compounds of tantalum and carbon with the empirical formula TaCx, where x usually varies between...
hardmasks are used. The most common metal for hardmasks is titanium nitride, but tantalumnitride has also been used. Shi et al., p. 87 Shi et al., p. 87 Shi...
Niobium nitride is a compound of niobium and nitrogen (nitride) with the chemical formula NbN. At low temperatures (about 16 K) NbN becomes a superconductor...
is desired. A variety of metal gates such as tantalum, tungsten, tantalumnitride, and titanium nitride are used, usually in conjunction with high-κ dielectrics...
element similar to tantalum in 1801 and named it columbium. In 1809, English chemist William Hyde Wollaston wrongly concluded that tantalum and columbium were...
can be e.g. tantalum diboride, titanium diboride, zirconium diboride, niobium diboride, tantalum carbide, zirconium carbide, tantalumnitride, and zirconium...
varies, consisting of one or more ceramic (cermet) conductors such as tantalumnitride (TaN), ruthenium oxide (RuO 2), lead oxide (PbO), bismuth ruthenate...
Zirconium nitride (ZrN) is an inorganic compound used in a variety of ways due to its properties. ZrN grown by physical vapor deposition (PVD) is a light...
an even higher melting point of 3,958 °C exceeding those of tantalum carbide and tantalum hafnium carbide which were both previously estimated to be higher...
of niobium relative to tantalum. Niobium is a sister metal to tantalum. Niobium has a similar melting point (2744 °C) to tantalum and exhibits similar chemical...
sodium borate, and the ultra-hard crystals of boron carbide and boron nitride. Boron is synthesized entirely by cosmic ray spallation and supernovae...
crucible (made of pyrolytic boron nitride, quartz, tungsten or graphite), heating filaments (often made of metal tantalum), water cooling system, heat shields...
compounds. The intrinsic group includes diamond, cubic boron nitride (c-BN), carbon nitrides, and ternary compounds such as B-N-C, which possess an innate...
carbides commonly use tungsten carbide (WC), titanium carbide (TiC), or tantalum carbide (TaC) as the aggregate. Mentions of "carbide" or "tungsten carbide"...
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