Emission of surface atoms through energetic particle bombardment
A commercial AJA Orion sputtering system at Cornell NanoScale Science and Technology FacilityIon thruster operating on iodine (yellow) using a xenon (blue) hollow cathode. High-energy ions emitted from plasma thrusters sputter material off the surrounding test chamber, causing problems for ground testing of high-power thrusters.[1]
In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas.[2] It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on extremely fine layers of material is utilised in science and industry—there, it is used to perform precise etching, carry out analytical techniques, and deposit thin film layers in the manufacture of optical coatings, semiconductor devices and nanotechnology products. It is a physical vapor deposition technique.[3]
^Lobbia, R.B.; Polk, J.E.; Hofer, R.R.; Chaplin, V.H; Jorns, B. (2019-08-19). "Accelerating 23,000 hours of ground test backsputtered carbon on a magnetically shielded Hall thruster". AIAA Propulsion and Energy 2019 Forum. doi:10.2514/6.2019-3898. ISBN 978-1-62410-590-6.
^R. Behrisch, ed. (1981). Sputtering by Particle bombardment. Springer, Berlin. ISBN 978-3-540-10521-3.
sputtered such that the composition of the sputtered material will ultimately return to AB. The term electronic sputtering can mean either sputtering...
Sputter deposition is a physical vapor deposition (PVD) method of thin film deposition by the phenomenon of sputtering. This involves ejecting material...
The Sputter Gun was a prototype test gun using 7 major components from the WW2 era British Sten submachine gun carbine, along with other specially fabricated...
An ion pump (also referred to as a sputter ion pump) is a type of vacuum pump which operates by sputtering a metal getter. Under ideal conditions, ion...
the cathode is made. This process is called sputtering and it gradually ablates the cathode. Sputtering is useful when using spectroscopy to analyze...
Ion beams can be used for sputtering or ion beam etching and for ion beam analysis. Ion beam application, etching, or sputtering, is a technique conceptually...
mechanisms that can cause atmosphere depletion are solar wind-induced sputtering, impact erosion, weathering, and sequestration—sometimes referred to as...
technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting...
can impart sufficient energy to eject atmospheric particles, similar to sputtering from a solid surface. This type of interaction is more pronounced in the...
especially excess current, which increases sputtering of the electrodes. A few extreme examples of sputtering have even resulted in complete disintegration...
vintage motorcycles and while Frank scores deal after deal, Mike's efforts sputter and stall. With his family hit hard by the recession, a prolific collector...
absorber layer from sputtering damage while depositing the ZnO:Al window layer, since the latter is usually deposited by DC sputtering, known as a damaging...
cleaning, metals are deposited via sputter deposition, evaporation or chemical vapor deposition (CVD). Sputtering is a faster and more convenient method...
3 nPa); it varies with the lunar day. Its sources include outgassing and sputtering, a product of the bombardment of lunar soil by solar wind ions. Elements...
amorphous hydrogenated silicon, with special emphasis on preparation by sputtering". Solar Energy Materials. 5 (3): 229–316. doi:10.1016/0165-1633(81)90001-0...
Malcolm (September 13, 1992). "College Football – Notre Dame and Michigan Sputter at the End to a 17–17 Tie". The New York Times. Archived from the original...
several ways by which the magnet could be fabricated on a MEMS structure: Sputtering: Argon ion bombardment of the material release particles of the material...
Gonchar, V.; Zhidkov, A.; Zhidkov, V. (2002). "Radiation damages and self-sputtering of high-radioactive dielectrics: spontaneous emission of submicronic dust...
Heuer; Stageberg; Chow; Rook; Heuer (1994). "Influence of rf magnetron sputtering conditions on the magnetic, crystalline, and electrical properties of...
discharge plasma created from various gases Sputter cleaning, performed in a vacuum by using physical sputtering of the surface Steam cleaning, in both domestic...
extremely rapid rates of cooling. Amorphous metal wires have been produced by sputtering molten metal onto a spinning metal disk. Several alloys have been produced...
got a touchdown early in the first quarter. After that, both offenses sputtered, and the Eagles had to settle for two field goals. But things rapidly...
limited to ~5 nm by sputtering and detector efficiency). At higher primary currents, a great deal of material can be removed by sputtering, allowing precision...
Global Information
