Old magnetic sector SIMS, model IMS 3f, succeeded by the models 4f, 5f, 6f, 7f and most recently, 7f-Auto, launched in 2013 by the manufacturer CAMECA.
Acronym
SIMS
Classification
Mass spectrometry
Analytes
Solid surfaces, thin films
Other techniques
Related
Fast atom bombardment Microprobe
Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions. The mass/charge ratios of these secondary ions are measured with a mass spectrometer to determine the elemental, isotopic, or molecular composition of the surface to a depth of 1 to 2 nm. Due to the large variation in ionization probabilities among elements sputtered from different materials, comparison against well-calibrated standards is necessary to achieve accurate quantitative results. SIMS is the most sensitive surface analysis technique, with elemental detection limits ranging from parts per million to parts per billion.
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Secondary-ionmassspectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the...
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of the renowned experts in materials analysis using ion beams and secondaryionmassspectrometry (SIMS). He is a former senior professor of Physics at...
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