For silicon on insulator optical devices, see silicon photonics.
In semiconductor manufacturing, silicon on insulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving performance.[1] SOI-based devices differ from conventional silicon-built devices in that the silicon junction is above an electrical insulator, typically silicon dioxide or sapphire (these types of devices are called silicon on sapphire, or SOS). The choice of insulator depends largely on intended application, with sapphire being used for high-performance radio frequency (RF) and radiation-sensitive applications, and silicon dioxide for diminished short-channel effects in other microelectronics devices.[2] The insulating layer and topmost silicon layer also vary widely with application.[3]
^Celler, G. K.; Cristoloveanu, S. (2003). "Frontiers of silicon-on-insulator". Journal of Applied Physics. 93 (9): 4955. Bibcode:2003JAP....93.4955C. doi:10.1063/1.1558223.
^Marshall, Andrew; Natarajan, Sreedhar (2002). SOI design: analog, memory and digital techniques. Kluwer. ISBN 0-7923-7640-4.
^Colinge, Jean-Pierre (1991). Silicon-on-Insulator Technology: Materials to VLSI. Springer. ISBN 978-0-7923-9150-0.
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manufacturing, silicononinsulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to...
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(typically thinner than 0.6 µm) of silicon grown on a sapphire (Al 2O 3) wafer. SOS is part of the silicon-on-insulator (SOI) family of CMOS (complementary...
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production of silicon-on-insulator (SOI) wafer substrates. The role of SOI is to electronically insulate a fine layer of monocrystalline silicon from the rest...
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Driessen, A (2008). "Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides" (PDF). Journal of Physics D. 40 (14): R249–R271. Bibcode:2007JPhD...
zirconium dioxide which is a superior insulator reducing current leakages. Using zirconium dioxide instead of silicon dioxide, this transistor can reduce...
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Wiktionary, the free dictionary. SOI or soi or variation may refer to: Silicononinsulator, in semiconductor manufacturing Signal operating instructions Service-oriented...
silicononinsulator (SoI) – a layered silicon–insulator–silicon substrate SiP – see system in package SoC – see system on chip SoI – see siliconon insulator...
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