Fig. 1. The surface of a MEMS device is cleaned with bright, blue oxygen plasma in a plasma etcher to rid it of carbon contaminants. (100mTorr, 50W RF)
Plasma cleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma or dielectric barrier discharge (DBD) plasma created from gaseous species. Gases such as argon and oxygen, as well as mixtures such as air and hydrogen/nitrogen are used. The plasma is created by using high frequency voltages (typically kHz to >MHz) to ionise the low pressure gas (typically around 1/1000 atmospheric pressure), although atmospheric pressure plasmas are now also common.[1]
^Evgeny V. Shun’ko & Veniamin V. Belkin (2007). "Cleaning Properties of atomic oxygen excited to metastable state 2s22p4(1S0)". J. Appl. Phys. 102 (8): 083304–1–14. Bibcode:2007JAP...102h3304S. doi:10.1063/1.2794857.
Plasmacleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma or dielectric barrier discharge (DBD)...
Several cleaning methods Cleaning is the process of removing unwanted substances, such as dirt, infectious agents, and other impurities, from an object...
process. When the surfaces to be cleaned are large, a similar technique, plasmacleaning, can be used. Sputter cleaning has some potential problems such...
Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate...
environment. Plasma afterglow has shown to be an effective means of cleaning and sterilizing difficult to take apart machinery and glassware. Plasmacleaning uses...
manufacturing, including equipment for thin film deposition, plasma etch, photoresist strip, and wafer cleaning processes. Throughout semiconductor manufacturing...
(October 2004). "Plasma-Reduction: Its Potential for Use in the Conservation of Metals" (PDF). Retrieved 1 October 2013. "Cleaning treatment of a tarnished...
Plasma cutting is a process that cuts through electrically conductive materials by means of an accelerated jet of hot plasma. Typical materials cut with...
generating plasma at atmospheric pressure. The plasma itself is used to modify or clean (plasmacleaning) surfaces of materials (e.g. polymers, semiconductor...
coating and painting. Plasma processing achieves this effect through a combination of reduction of metal oxides, ultra-fine surface cleaning from organic contaminants...
Plasma arc welding (PAW) is an arc welding process similar to gas tungsten arc welding (GTAW). The electric arc is formed between an electrode (which is...
The three main methods used are: gas nitriding, salt bath nitriding, and plasma nitriding. In gas nitriding the donor is a nitrogen-rich gas, usually ammonia...
three categories: Plasma etching systems (RIE, ICP, DRIE) Plasma deposition systems (PECVD and LS-CVD®) Surface treatment systems (plasma cleaners, UV-Ozone...
Inductively coupled plasma atomic emission spectroscopy (ICP-AES), also referred to as inductively coupled plasma optical emission spectroscopy (ICP-OES)...
A nonthermal plasma, cold plasma or non-equilibrium plasma is a plasma which is not in thermodynamic equilibrium, because the electron temperature is...
Inductively coupled plasma mass spectrometry (ICP-MS) is a type of mass spectrometry that uses an inductively coupled plasma to ionize the sample. It atomizes...
uses a powerful magnetic field generated by external magnets to confine plasma in the shape of an axially-symmetrical torus. The tokamak is one of several...
surfaces that have been subjected to heat treatment, corona treatment, plasmacleaning, or polymers that contain heteroatoms do not lend themselves to this...
a scanning transmission electron microscope and its suppression by plasmacleaning". Journal of Physics: Conference Series. 241 (1): 012017. Bibcode:2010JPhCS...
power that uses magnetic fields to confine fusion fuel in the form of a plasma. Magnetic confinement is one of two major branches of controlled fusion...
reproducibility and for cleaning and surface engineering of plastics, rubbers and natural fibers as well as for replacing CFCs for cleaning metal components...
with sufficient temperature, pressure, and confinement time to create a plasma in which fusion can occur. The combination of these figures that results...
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