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Nanolithography information


Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials.

The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.[1]

  1. ^ Hawkes, Peter W. (2010). Advances in imaging and electron physics. Volume 164. Amsterdam: Academic Press. ISBN 978-0-12-381313-8. OCLC 704352532.

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Nanolithography

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Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing...

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Thermochemical nanolithography

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Thermochemical nanolithography (TCNL) or thermochemical scanning probe lithography (tc-SPL) is a scanning probe microscopy-based nanolithography technique...

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Plasmonic nanolithography

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Plasmonic nanolithography (also known as plasmonic lithography or plasmonic photolithography) is a nanolithographic process that utilizes surface plasmon...

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Local oxidation nanolithography

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Local oxidation nanolithography (LON) is a tip-based nanofabrication method. It is based on the spatial confinement on an oxidation reaction under the...

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Nanotechnology

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pattern in a process called dip pen nanolithography. This technique fits into the larger subfield of nanolithography. Molecular Beam Epitaxy allows for...

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Gray goo

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nanotechnology Nanoelectronics Molecular scale electronics Molecular logic gate Nanolithography Moore's law Semiconductor device fabrication Semiconductor scale examples...

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Nanoelectronics

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approaches are currently being researched, including new forms of nanolithography, as well as the use of nanomaterials such as nanowires or small molecules...

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Nanochemistry

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Light coupling nanolithography Scanning probe microscope Nanoimprint lithography Dip-Pen nanolithography Soft lithography Each nanolithography technique has...

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Outline of nanotechnology

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micromachining – Nanoelectromechanical relays Molecular electronics – Nanolithography – Electron beam lithography – Ion-beam sculpting – Nanoimprint lithography...

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Holography

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64, pp. 390–402 (2004) Ogai, K.; et al. (1993). "An Approach for Nanolithography Using Electron Holography". Jpn. J. Appl. Phys. 32 (12S): 5988–5992...

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Lon

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Network, a networking platform by Echelon Corporation Local oxidation nanolithography, a nanofabrication technique Lon (butterfly), a genus of butterflies...

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Scanning probe microscopy

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nanotechnology Nanoelectronics Molecular scale electronics Molecular logic gate Nanolithography Moore's law Semiconductor device fabrication Semiconductor scale examples...

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Nanosensor

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nanotechnology Nanoelectronics Molecular scale electronics Molecular logic gate Nanolithography Moore's law Semiconductor device fabrication Semiconductor scale examples...

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Photolithography

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the photolithography industry was valued over 8 billion USD. Dip-pen nanolithography Soft lithography Magnetolithography Nanochannel glass materials Stereolithography...

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DPN

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Yardstick system of handicapping for dissimilar boats in a race Dip-pen nanolithography, a scanning probe lithography technique Diseased Pariah News (1990–1999)...

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use in a range of devices, including: optical systems; semiconductor nanolithography; and even vehicles for drug delivery. With an appropriate artificial...

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nanotechnology Nanoelectronics Molecular scale electronics Molecular logic gate Nanolithography Moore's law Semiconductor device fabrication Semiconductor scale examples...

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Nanoimprint lithography

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is a method of fabricating nanometer-scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates...

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Nanoelectromechanical systems

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Molecular wires Solid-state nanoelectronics Nanocircuitry Nanowires Nanolithography NEMS Nanosensor Moore's law Multigate device Semiconductor device fabrication...

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Microlithography

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features of microscopic size, such as 10 micrometres or less. The term nanolithography may be used to designate processes that can produce nanoscale features...

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Stencil lithography

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with nanometer size apertures. It is a resist-less, simple, parallel nanolithography process, and it does not involve any heat or chemical treatment of...

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Atom localization

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measurement of the position of atom-like entities such as microscopy, nanolithography, optical trapping of atoms, optical lattices, and atom optics. Atom...

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Thermal scanning probe lithography

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Soft lithography

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~100 nm). The resolution depends on the mask used and can reach 6 nm. Nanolithography In the words of Rogers and Nuzzo, p. 50, as cited in "Further reading"...

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Scanning probe lithography

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Extreme ultraviolet lithography

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history, ideal plasma, present status, and prospects". Journal of Micro/Nanolithography, MEMS, and MOEMS. 11 (2): 021109–1. doi:10.1117/1.JMM.11.2.021109....

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