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Microoptoelectromechanical systems information


Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.

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Microoptoelectromechanical systems

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Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing...

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MEMS

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applications. MEMS sensor generations Microoptoelectromechanical systems Microoptomechanical systems Nanoelectromechanical systems Gabriel K, Jarvis J, Trimmer...

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Strain gauge

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optical ring resonators may be used to measure strain in microoptoelectromechanical systems (MOEMS). Capacitive strain gauges use a variable capacitor...

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Microoptomechanical systems

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which use optical and mechanical, but not electronic components. Microoptoelectromechanical systems (MOEMS) Nanoelectromechanical systems (NEMS) v t e...

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Yael Nemirovsky

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engineer known for her research in microelectromechanical systems and microoptoelectromechanical systems. She is a professor emerita of electrical engineering...

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Microfabrication

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semiconductor manufacturing) microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS) microfluidic devices (ink jet print heads)...

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Digital micromirror device

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The digital micromirror device, or DMD, is the microoptoelectromechanical system (MOEMS) that is the core of the trademarked Digital Light Processing...

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Engineering science and mechanics

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microfabrication, microfluidic systems, microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS), nanotechnology, neural...

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Photoelectrowetting

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necessity of underlying patterned electrodes. Optoelectrowetting Microoptoelectromechanical systems S. Arscott, 'Moving liquids with light: Photoelectrowetting...

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Microscanner

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A microscanner, or micro scanning mirror, is a microoptoelectromechanical system (MOEMS) in the category of micromirror actuators for dynamic light modulation...

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