A gold and aluminum sputtered solar cell manufactured from a <100> p-type silicon wafer at the Cal Poly San Luis Obispo Microfab clean room.
Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro- and nano- scale, typically on the surface of silicon wafers, for the production of integrated circuits, microelectromechanical systems (MEMS), solar cells, and other devices. Photolithography makes this process possible through the combined use of hexamethyldisilazane (HMDS), photoresist (positive or negative), spin coating, photomask, an exposure system and other various chemicals. By carefully manipulating these factors it is possible to create nearly any geometry microstructure on the surface of a silicon wafer.[1] The chemical interaction between all the different components and the surface of the silicon wafer makes photolithography an interesting chemistry problem. Current engineering has been able to create features on the surface of silicon wafers between 1 and 100 μm.[2]
^Fourkas, John T. (15 April 2010). "Nanoscale Photolithography with Visible Light". The Journal of Physical Chemistry Letters. 1 (8): 1221–1227. doi:10.1021/jz1002082.
^Microelectromechanical systems
and 22 Related for: Chemistry of photolithography information
Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro-...
Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer...
the development of electronic materials. He is known for innovations in the chemistryofphotolithography, particularly the development of anti-reflective...
concentration of fluorine-containing dusts is 2.5 mg/m3 in air. List of laser types Photolithography Skeletal fluorosis Pradyot Patnaik. Handbook of Inorganic...
resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This...
need for costly vacuum chambers. Significant examples include 193-nm photolithography equipment (for semiconductor manufacturing) and circular dichroism...
Gas mixtures that include high-purity neon are used in lasers for photolithography in semiconductor device fabrication. Liquefied neon is commercially...
1827), and the first realisation of photoresist as means to reproduce artworks through inventions ofphotolithography and photogravure. Nicéphore Niépce...
the fabrication of large OLED/AMOLED displays. Experimental OLED displays using conventional photolithography techniques instead of FMMs have been demonstrated...
compaction of the phrase self-aligned silicide. The description "self-aligned" suggests that the contact formation does not require photolithography patterning...
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process...
This is a list of inorganic and organic reagents commonly used in chemistry. Reagents are "substances or compounds that are added to a system in order...
fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes. Silicon...
J. Holmes, P.J Snell (1966). "A vapour etching technique for the photolithographyof silicon dioxide". Microelectronics and Reliability. 5 (4): 337–341...
Commerce, Trente et Quarante, Belote and maybe Blackjack. Photography : Photolithography and the first photographic image ever produced in 1822 by Nicéphore...
nanolithography (also known as plasmonic lithography or plasmonic photolithography) is a nanolithographic process that utilizes surface plasmon excitations...
observational results. The argon fluoride laser is important in photolithographyof silicon chips. These lasers make a strong ultraviolet emission at...
vitamin (vitamin B4). It is a structural part of phospholipids and a methyl donor in metabolic one-carbon chemistry. The compound is related to trimethylglycine...
included vacuum deposition of aluminium through a mask and deposition of a continuous layer, followed by photolithography and etching off the excess metal...
combination of strength, thermal stability, and UV transparency makes it an excellent substrate for projection masks for photolithography. Its UV transparency...
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