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Ultra low expansion glass (ULE) is a registered trademark of Corning Incorporated. ULE has a very low coefficient of thermal expansion and contains as components silica and less than 10% titanium dioxide. Such high resistance to thermal expansion makes it very resistant to high temperature thermal shock. ULE has been made by Corning since the 1960s,[1] but is still very important to current applications.
^Hrdina, Ken. "Production and Properties of ULE Glass with Regards to EUV Masks" (PDF). Materials Technology Division. Retrieved 2012-12-12.
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