Standard cubic centimeters per minute (SCCM) is a unit used to quantify the flow rate of a fluid. 1 SCCM is identical to 1 cm³STP/min. Another expression of it would be Nml/min. These standard conditions vary according to different regulatory bodies. One example of standard conditions for the calculation of SCCM is = 0 °C (273.15 K)[1] and = 1.01 bar (14.72 psia) and a unity compressibility factor = 1 (i.e., an ideal gas is used for the definition of SCCM).[2] This example is for the semi-conductor-manufacturing industry.
^May, G. S., Spanos, C. J. (2006). Fundamentals of semiconductor manufacturing and process control. John Wiley and Sons. p. 110.{{cite book}}: CS1 maint: multiple names: authors list (link)
^SEMI (2024). SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers. SEMI. Retrieved March 24, 2024.
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