Fabrication technology used to create high-aspect-ratio microstructures
This article is about a lithographic fabrication technology. For other uses, see liga (disambiguation).
The X-ray LIGA process was originally developed at the Forschungszentrum Karlsruhe, Germany, to produce nozzles for uranium enrichment.SEM picture of a polymer LIGA structure made by molding. Smallest polymer width is 6 µm; polymer height is 120 µm, the aspect ratio is, therefore, 20.SEM picture of a polymer LIGA structure made by x-ray lithography. Step length is 3 µm, step height is 0.7 µm. The pattern extends downwards towards the substrate for 150 µm leading to an aspect ratio of the contour of 200.
LIGA is a fabrication technology used to create high-aspect-ratio microstructures. The term is a German acronym for Lithographie, Galvanoformung, Abformung – lithography, electroplating, and molding.
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schwäbisch". propheten-der-liga.de. "Jugos im Abseits. Gastarbeiterfußball in Württemberg". historischer-augenblick.de. "Jugo-Liga, Folklore und Cevapcici...
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